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Chemical bond manipulation for nanostructure integration on wafer scale
Author(s) -
K. Prabhakaran,
T. Ogino
Publication year - 1999
Publication title -
bulletin of materials science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.35
H-Index - 72
eISSN - 0973-7669
pISSN - 0250-4707
DOI - 10.1007/bf02749968
Subject(s) - materials science , nanopillar , nanostructure , nanotechnology , fabrication , wafer , chemical beam epitaxy , chemical bond , nitride , silicon , surface diffusion , atomic units , molecular beam epitaxy , epitaxy , optoelectronics , chemistry , physics , quantum mechanics , medicine , alternative medicine , organic chemistry , pathology , layer (electronics) , adsorption

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