Open AccessResputtering-induced chemical inhomogeneity during the growth of highT c superconductor thin film
Author(s) -
S. İsmat Shah
Publication year - 1991
Publication title -
bulletin of materials science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.35
H-Index - 72
eISSN - 0973-7669
pISSN - 0250-4707
DOI - 10.1007/bf02747364
Subject(s) - sputtering , materials science , oxygen , yield (engineering) , sputter deposition , analytical chemistry (journal) , thin film , chemical composition , composite material , nanotechnology , chemistry , organic chemistry , chromatography
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