Open AccessPreparation of epitaxial YBa2Cu3O7−x films by magnetron sputtering
Author(s) -
I.M. Kotelyansky,
В. Б. Кравченко,
В. А. Лузанов,
A. T. Sobolev
Publication year - 1991
Publication title -
bulletin of materials science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.35
H-Index - 72
eISSN - 0973-7669
pISSN - 0250-4707
DOI - 10.1007/bf02747360
Subject(s) - materials science , orthorhombic crystal system , epitaxy , tetragonal crystal system , sputter deposition , substrate (aquarium) , thin film , sputtering , crystallography , cavity magnetron , analytical chemistry (journal) , crystal structure , composite material , nanotechnology , layer (electronics) , chemistry , oceanography , chromatography , geology
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