Open AccessInsulating ZnO film on silicon for MIS application
Author(s) -
Atanu Dutta,
S. Basu
Publication year - 1992
Publication title -
bulletin of materials science
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.35
H-Index - 72
eISSN - 0973-7669
pISSN - 0250-4707
DOI - 10.1007/bf02745296
Subject(s) - materials science , wafer , silicon , semiconductor , optoelectronics , thin film , resistive touchscreen , zinc , silicon on insulator , nanotechnology , metallurgy , electrical engineering , engineering
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