Open AccessR.F. magnetron sputtered tungsten carbide thin films
Author(s) -
P. K. Srivastava,
V. D. Vankar,
K. L. Chopra
Publication year - 1986
Publication title -
bulletin of materials science
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.35
H-Index - 72
eISSN - 0973-7669
pISSN - 0250-4707
DOI - 10.1007/bf02744149
Subject(s) - materials science , tungsten carbide , sputter deposition , acetylene , thin film , tungsten , cavity magnetron , carbide , argon , composite material , metallurgy , indentation hardness , sputtering , analytical chemistry (journal) , microstructure , nanotechnology , chemistry , physics , organic chemistry , atomic physics , chromatography
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