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Metal Complexes of Donor‐functionalized Fluorinated β ‐Ketoiminates – Synthesis, Structure, and CVD Application
Author(s) -
Kaiser Kevin,
Ganesamoorthy Chelladurai,
Wölper Christoph,
Schulz Stephan
Publication year - 2020
Publication title -
zeitschrift für anorganische und allgemeine chemie
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.354
H-Index - 66
eISSN - 1521-3749
pISSN - 0044-2313
DOI - 10.1002/zaac.201900239
Subject(s) - homoleptic , chemical vapor deposition , chemistry , x ray photoelectron spectroscopy , crystallite , metal , alkali metal , crystal structure , crystallography , nuclear chemistry , inorganic chemistry , organic chemistry , chemical engineering , engineering
Six alkali metal complexes of partly‐fluorinated, donor‐functionalized β ‐ketoiminate ligands [L 1 Li ( 1 ), L 1 Na ( 2 ), L 1 K ( 3 ), L 1 Cs ( 4 ), L 1 = OC(CF 3 )CHC(CH 3 )NCH 2 CH 2 OCH 3 ; L 2 Li ( 5 ), L 2 Na ( 6 ), L 2 = OC(CF 3 )CHC(CH 3 )NCH 2 CH 2 N(CH 3 ) 2 ] were prepared and structurally characterized. Reactions of L 1 Li with PtCl 2 gave the homoleptic Pt complex L 1 2 Pt ( 7 ), which was characterized spectroscopically and by single‐crystal X‐ray diffraction and whose promising application as CVD precursor (chemical vapor deposition) is shown. Polycrystalline, pure Pt films were grown at 500 °C on SiO 2 @Si(100) substrates at 10 –3 mbar and characterized by XRD, SEM, AFM, EDX and XPS.