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Development of confocal 3D micro‐XRF spectrometer with dual CrMo excitation
Author(s) -
Tsuji Kouichi,
Nakano Kazuhiko
Publication year - 2007
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.957
Subject(s) - confocal , spectrometer , optics , materials science , lens (geology) , silicon drift detector , x ray tube , x ray , foil method , analytical chemistry (journal) , detector , chemistry , physics , chromatography , electrode , anode , composite material
A new 3D micro‐XRF instrument based on a confocal setup using two independent polycapillary x‐ray lenses and two x‐ray sources (Cr and Mo targets) was developed. A full polycapillary x‐ray lens was attached to each x‐ray tube. Another half polycapillary lens was attached to a silicon drift x‐ray detector (SDD). The focal spots of the three lenses were adjusted to a common position. The depth resolutions that were evaluated by use of a 10‐µm thick Au foil were approximately 90 µm for the x‐ray energy of Au Lα. The effects of the dual Cr–Mo x‐ray beam excitation were investigated. It was confirmed that the XRF intensity of light elements was increased by applying the Cr‐target x‐ray tube in a confocal configuration. In the proposed confocal configuration, 3D elemental mapping of the major elements of an amaranth seed was performed nondestructively at ambient air pressure. Each element of the seed showed different mapping images in the different depth layers. Copyright © 2007 John Wiley & Sons, Ltd.