Improvement of reproducibility in grazing‐exit EPMA (GE‐EPMA) | Zendy

Tetsuoka K. | Zendy; Nagamura T. | Zendy; Tsuji K. | Zendy

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Improvement of reproducibility in grazing‐exit EPMA (GE‐EPMA)

Author(s) -

Tetsuoka K.,

Nagamura T.,

Tsuji K.

Publication year - 2005

Publication title -

x‐ray spectrometry

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.447

H-Index - 45

eISSN - 1097-4539

pISSN - 0049-8246

DOI - 10.1002/xrs.845

Subject(s) - electron microprobe , reproducibility , electron probe microanalysis , materials science , microanalysis , analytical chemistry (journal) , optics , chemistry , physics , metallurgy , chromatography , organic chemistry

In grazing exit electron probe microanalysis (GE‐EPMA), characteristic x‐rays emitted from only near surface regions of a specimen are detected at extremely low exit angles near 0°. Therefore, GE‐EPMA is useful for localized surface analysis. However, there is a practical problem with GE‐EPMA, namely, reproducibility of angle adjustment. Therefore, we developed a new instrument, a ‘laser beam and four‐separated photodetector system’, to adjust the sample inclination. It was found that the reproducibility of angle adjustment was improved by about one‐tenth by applying this system. Copyright © 2005 John Wiley & Sons, Ltd.

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