Premium
Improvement of reproducibility in grazing‐exit EPMA (GE‐EPMA)
Author(s) -
Tetsuoka K.,
Nagamura T.,
Tsuji K.
Publication year - 2005
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.845
Subject(s) - electron microprobe , reproducibility , electron probe microanalysis , materials science , microanalysis , analytical chemistry (journal) , optics , chemistry , physics , metallurgy , chromatography , organic chemistry
In grazing exit electron probe microanalysis (GE‐EPMA), characteristic x‐rays emitted from only near surface regions of a specimen are detected at extremely low exit angles near 0°. Therefore, GE‐EPMA is useful for localized surface analysis. However, there is a practical problem with GE‐EPMA, namely, reproducibility of angle adjustment. Therefore, we developed a new instrument, a ‘laser beam and four‐separated photodetector system’, to adjust the sample inclination. It was found that the reproducibility of angle adjustment was improved by about one‐tenth by applying this system. Copyright © 2005 John Wiley & Sons, Ltd.