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Monte Carlo study of quantitative EPMA analysis of a non‐conducting sample with a coating film
Author(s) -
Osada Yoshio
Publication year - 2004
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.798
Subject(s) - electron microprobe , coating , monte carlo method , microanalysis , materials science , electron probe microanalysis , attenuation , analytical chemistry (journal) , chemistry , composite material , metallurgy , optics , physics , chromatography , statistics , mathematics , organic chemistry
Generally, the ZAF method has been used for quantitative electron probe microanalysis (EPMA) analysis of conducting samples. However, the ZAF method is not applied to non‐conducting samples with coating films, mainly because the x‐ray intensity and the primary electron energy are both attenuated within the coating films. In this study, for application to the ZAF method we tried to correct the x‐ray attenuation and the primary electron energy attenuation by Monte Carlo simulation. As calculation models, we selected carbon coating as a light element and gold coating as heavy element and selected four kinds of materials, Al 2 O 3 , BN, AlN and Al 4 C 3 , as non‐conducting targets. After the correction we compared the calculated results and theoretical compositions. The calculated results were in good agreement with theoretical compositions. Finally, to verify the method we measured standard Al 4 C 3 coated with gold (100 Å thickness). The experimental result showed good agreement with the theoretical composition. In conclusion, we confirmed that this method is useful for the quantitative analysis of non‐conducting samples with coating films. Further, by combining this method with appropriate standard compounds, we can obtain the hypothetical pure x‐ray intensities of gaseous pure elements. Copyright © 2004 John Wiley & Sons, Ltd.