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Thin‐film characterization with x‐ray microanalysis. Extending and improving invariant embedding results
Author(s) -
Heluani Silvia P.,
Hoffmann C.
Publication year - 2003
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.629
Subject(s) - microanalysis , invariant (physics) , embedding , thin film , electron probe microanalysis , characterization (materials science) , x ray , optics , materials science , analytical chemistry (journal) , physics , chemistry , scanning electron microscope , computer science , nanotechnology , quantum mechanics , artificial intelligence , organic chemistry , chromatography
Invariant embedding theoretical results for the recorded x‐ray intensities in electron probe microanalysis were used to develop a procedure for thin films. The method presented here gives the possibility of achieving thin‐film characterization directly from characteristic x‐rays intensities measurements, without the necessity to make an explicit calculation of the ϕ(ρ z ) function. Theoretical results are found to follow the general trend of experimental data. Copyright © 2003 John Wiley & Sons, Ltd.