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Method for the calculation of the chemical composition of a thin film by Monte Carlo simulation and electron probe microanalysis
Author(s) -
Hu Youhua,
Pan Yinrong
Publication year - 2001
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.471
Subject(s) - monte carlo method , electron microprobe , microanalysis , substrate (aquarium) , electron probe microanalysis , analytical chemistry (journal) , thin film , electron scattering , chemical composition , scattering , electron , excitation , chemistry , materials science , computational physics , molecular physics , statistical physics , optics , physics , mineralogy , nanotechnology , thermodynamics , mathematics , chromatography , nuclear physics , statistics , quantum mechanics , oceanography , organic chemistry , geology
Based on a simplified Monte Carlo simulation model of electron scattering and characteristic x‐ray excitation of a multicomponent film on a substrate, a calculation method with an iteration approach was developed to transform the x‐ray intensity ratios measured by an electron probe microanalyzer into the chemical composition of the thin film on the substrate. The calculation of the characteristic fluorescence is also included in the simulation. The calculation results of compositions for several specimens agree well with measured data. Copyright © 2001 John Wiley & Sons, Ltd.