The influence of polarization and filtration of beams on the ED spectrometers sensitivity

The topic under discussion is the influence of X‐ray polarization and filtration, as well as the influence of detectors count rate on sensitivity and detection limits (DLs) in spectrometers with energy dispersion (EDS). Parameters calculation technique for searching optimal analysis conditions has been developed. Typical DLs of elements with medium and high atomic numbers on various spectrometers are given (on wave dispersive spectrometers (WDS), energy dispersive spectrometers (EDS) without polarization and energy‐dispersive polarized‐beam X‐ray spectrometers (EDPXRS). Apparently, EDS variants are preferred for determining elements with Z > 62–65, and EDPXRS spectrometers with concave targets and increased aperture are preferred for determining elements with medium atomic numbers.