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Evaluation of full‐field energy dispersive X‐ray fluorescence imaging apparatus and super resolution analysis with compressed sensing technique
Author(s) -
Yamauchi Aoi,
Iwasaki Masanori,
Hayashi Kazunori,
Tsuji Kouichi
Publication year - 2019
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.3055
Subject(s) - spectrometer , resolution (logic) , optics , x ray fluorescence , materials science , image resolution , imaging spectrometer , energy (signal processing) , charge coupled device , fluorescence , compressed sensing , detection limit , sensitivity (control systems) , photon counting , analytical chemistry (journal) , photon , chemistry , physics , computer science , chromatography , quantum mechanics , artificial intelligence , electronic engineering , engineering
A full‐field energy dispersive X‐ray fluorescence (FF‐EDXRF) imaging spectrometer that utilizes single‐photon counting analysis with a charge‐coupled device was developed in our laboratory. We evaluated the developed spectrometer with respect to its energy resolution, spatial resolution, quantitative performance, and elemental imaging and compared it with the corresponding characteristics of scanning‐type EDXRF spectrometers. In addition, we demonstrate that the limit of detection and sensitivity deteriorate as the analytical area decreases. Finally, compressed sensing, which is a widely used information‐processing technique, was applied for clearing XRF images.