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Heavy ion induced Ti X‐ray satellite structure for Ti, TiN, and TiO 2 thin films
Author(s) -
Käyhkö Marko,
Palosaari Mikko R. J.,
Laitinen Mikko,
Arstila Kai,
Maasilta Ilari J.,
Sajavaara Timo
Publication year - 2018
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.2976
Subject(s) - tin , titanium , materials science , analytical chemistry (journal) , ion , spectral line , vacancy defect , metal , excitation , thin film , x ray , atomic physics , crystallography , physics , chemistry , nanotechnology , metallurgy , nuclear physics , quantum mechanics , astronomy , chromatography
X‐ray emission spectra of three different titanium‐containing thin films, Ti, TiO 2 , and TiN, were measured using 5.1 MeV 7 Li 2+ , 4.4–6.8 MeV 12 C 3+ , 6.8 MeV 16 O 3+ , and 11.9 MeV 63 Cu 6+ beams as excitation. The energy spectra were collected using a high energy resolution transition‐edge sensor array. In all measurements, the average L‐shell vacancy fraction was higher for the metallic Ti than for the other samples, whereas the difference between TiN and TiO 2 was negligible. The universal variable X n of the geometrical model was used to study the systematics of the average L‐shell vacancy fraction at the time of K α emission. Our experiments expand previously studied X n values, and a fairly good agreement with previous studies was found.