Premium
CASTOR, a new instrument for combined XRR‐GIXRF analysis at SOLEIL
Author(s) -
Ménesguen Y.,
Boyer B.,
Rotella H.,
Lubeck J.,
Weser J.,
Beckhoff B.,
Grötzsch D.,
Kanngießer B.,
Novikova A.,
Nolot E.,
Lépy M.C.
Publication year - 2017
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.2742
Subject(s) - beamline , metrology , optics , synchrotron , sample (material) , nanometre , x ray fluorescence , x ray reflectivity , synchrotron radiation , materials science , fluorescence , analytical chemistry (journal) , reflectivity , physics , chemistry , beam (structure) , chromatography , thermodynamics
A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X‐ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X‐ray fluorescence‐related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup. Copyright © 2017 John Wiley & Sons, Ltd.