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Chemical bonds and elemental compositions of BC x N y layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine
Author(s) -
Hoffmann Peter S.,
Baake Olaf,
Kosinova Marina L.,
Beckhoff Burkhard,
Klein Andreas,
Pollakowski Beatrix,
Trunova Valentina A.,
Sulyaeva Veronika S.,
Kuznetsov Fedor A.,
Ensinger Wolfgang
Publication year - 2012
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.2387
Subject(s) - borazine , x ray photoelectron spectroscopy , chemical vapor deposition , boranes , borane , analytical chemistry (journal) , chemistry , spectroscopy , raman spectroscopy , boron , boron nitride , organic chemistry , chemical engineering , catalysis , engineering , physics , quantum mechanics , optics
BC x N y films were produced from single‐source precursors in a chemical vapor deposition process. The boranes were introduced as precursors at low pressure conditions and at a temperature of 700 °C, whereas the borazine was handled at 400 °C and with a plasma enhancement at an electrical power input of 40 W. Additionally, as inert or reactive gases, H 2 , He, N 2 , and NH 3 , respectively, were used. The films deposited on Si(100) substrates were chemically characterized by X‐ray photoelectron spectroscopy and by synchrotron radiation‐based total‐reflection X‐ray fluorescence combined with near‐edge X‐ray absorption fine structure and quantified elementally by energy‐dispersive X‐ray spectroscopy. The results are critically compared. With the application of boranes without NH 3 , compounds with a dominating carbidic character were identified, whereas with the addition of NH 3 to the boranes, a nitridic character was prevalent. In case of using borazine for the synthesis, the nitridic character was found at the application of all auxiliary gases. For both groups stoichiometric formulas derived from energy‐dispersive X‐ray spectroscopy are proposed: B 3.5–4 C 4 N 2–2.5 for the carbidic region and B 3.5 C 1.5 N 5 for the nitridic region. Copyright © 2012 John Wiley & Sons, Ltd.