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Elemental depth profiling with a wire in microbeam X‐ray fluorescence analysis
Author(s) -
Iida Atsuo
Publication year - 2011
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1352
Subject(s) - microbeam , x ray fluorescence , detector , materials science , fluorescence , optics , analytical chemistry (journal) , charge coupled device , resolution (logic) , elemental analysis , chemistry , physics , computer science , chromatography , artificial intelligence , organic chemistry
This study proposes simple techniques involving the use of a thin wire set close to the sample surface to measure the elemental depth distribution in microbeam X‐ray fluorescence analysis. One is the X‐ray fluorescence detection in energy‐dispersive mode using a solid‐state detector in combination with the sample movement, and the other is in projection mode using an X‐ray charge‐coupled device camera. The minimum depth resolution (spatial resolution) obtained with a thin Mo wire is about 15 µm. Compared with a confocal depth‐profiling method, wire depth‐profile analysis is easy to implement, flexible, and has reasonable sensitivity. Copyright © 2011 John Wiley & Sons, Ltd.