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Determination of thickness maps of thin coatings by EDS EPMA
Author(s) -
Benhayoune H.,
Jbara O.,
Thomas X.,
Cazaux J.
Publication year - 1995
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300240312
Subject(s) - electron microprobe , calibration , substrate (aquarium) , materials science , thin film , analytical chemistry (journal) , optics , composite material , metallurgy , chemistry , geology , physics , nanotechnology , mathematics , statistics , oceanography , chromatography
A new experimental procedure for the measurement of the thickness fo thin coatings on substrates is presented. Based on the experimental determination of the electron backscattering coefficient η (via the measurement of the electric current of the correctly polarized specimen holder), the number of reference specimens to be used for the calibration during measurements can be reduced. Thickness maps free of artifacts associated with local changes in the substrate composition illustrate the proposed methods.