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Considerations on a 3D‐XRF by pixel scanning and variable x‐ray geometry
Author(s) -
Ebel M. F.,
Ebel H.,
Svagera R.,
Heller M.,
Wernisch J.,
Kaitna R.
Publication year - 1993
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300220423
Subject(s) - scanning electron microscope , x ray fluorescence , materials science , geometry , resolution (logic) , x ray , optics , cross section (physics) , radiation , analytical chemistry (journal) , fluorescence , chemistry , physics , mathematics , computer science , chromatography , quantum mechanics , artificial intelligence
The principle of a three‐dimensional x‐ray fluorescence analysis was verified by the example of lateral thickness distributions of Zn‐layers on steel. The results of the experiments were compared with those of measurements performed on a cross‐section with a scanning electron microscope. This comparison confirmed the XRF results and indicated the limitations of the method due to the present value of the lateral resolution of 1 mm, and the applicability of Zn Kα and Fe Kα radiation to layer thicknesses of ca. 20 μm.