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Characteristics of layered synthetic microstructure devices for x‐ray spectrometry applications
Author(s) -
Biltoft P. J.
Publication year - 1993
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300220422
Subject(s) - materials science , fabrication , x ray , x ray tube , layer (electronics) , mass spectrometry , spectrometer , optics , focus (optics) , characterization (materials science) , optoelectronics , anode , nanotechnology , chemistry , physics , alternative medicine , electrode , pathology , chromatography , medicine
Multi‐layer structures offer the unique ability to control the spectral distribution of x‐rays non‐grazing incidence and to provide the ability to focus x‐rays. This combination of attributes offers some exciting possibilities for x‐ray spectrometry. Double crystal monochromators using multi‐layer structures have shown high energy selectivity with reasonable throughput X‐ray optical systems using multi‐layers deposited on figured substrates have been used to focus x‐rays from a conventional tube to micron‐sized spots. Future x‐ray spectrometers will likely take advantage of the energy selection and focusing capabilities of multi‐layers as they become more readily available. Topics covered in this paper include the modification of spectral emissions from a conventional copper anode x‐ray tube by a multi‐layer, and multi‐layer fabrication and characterization techniques as they apply to energy‐dispersive x‐ray spectrometry.