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How accurate is the fundamental parameter approach? XRF analysis of bulk and multilayer samples
Author(s) -
De Boer D. K. G.,
Borstrok J. J. M.,
Leenaers A. J. G.,
Van Sprang H. A.,
Brouwer P. N.
Publication year - 1993
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300220109
Subject(s) - set (abstract data type) , biological system , statistical physics , materials science , computer science , computational physics , mathematics , physics , programming language , biology
The accuracy of Fundamental Parameter‐based XRF quantification is investigated for both bulk and multilayer analysis. It is found that for bulk materials the relative accuracy is of the order of 1% and for multilayers a few percent. The method can be set up in such a way that it contains an inherent validity check. Further possibilities of the Fundamental Parameter method are discussed.