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Simulation of relationships between substrate XRF intensities and film thicknesses
Author(s) -
Fan Qinmin
Publication year - 1993
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300220104
Subject(s) - substrate (aquarium) , materials science , monte carlo method , tin , nickel , optics , metallurgy , physics , geology , mathematics , oceanography , statistics
A Monte Carlo method was used to simulate relationships between substrate XRF intensities and film thicknesses for nickel film– and tin film–substrate systems. Experimental measurements of these relationships were performed for a few film–substrate systems. Good agreement between simulated and experimental values was obtained.