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Accurate description of surface ionization in electron probe microanalysis: An improved formulation
Author(s) -
Merlet Claude
Publication year - 1992
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300210507
Subject(s) - ionization , microanalysis , electron , monte carlo method , atomic physics , computational physics , expression (computer science) , electron probe microanalysis , surface (topology) , tracer , physics , chemistry , analytical chemistry (journal) , materials science , electron microprobe , ion , nuclear physics , mathematics , computer science , statistics , mineralogy , geometry , quantum mechanics , chromatography , organic chemistry , programming language
A new analytical expression of the surface ionization Φ(0) is derived in terms of atomic number and overvoltage. This expression is obtained by means of an analytical description of the energy distribution of backscattered electrons. The Φ(0) data for Pt, W, Sb, InSb, Ni, Co and Mg have been measured using the tracer technique. The Φ(0) values obtained by using the new expression compare more favourably with experimental results, Monte Carlo simulation and backscattering data from the literature than those obtained with the previous analytical models.