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Combined energy‐dispersive–wavelength‐dispersive quantitative electron microprobe analysis
Author(s) -
Ware N. G.
Publication year - 1991
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300200207
Subject(s) - electron microprobe , wavelength , energy (signal processing) , electron , materials science , optics , analytical chemistry (journal) , physics , chemistry , nuclear physics , metallurgy , chromatography , quantum mechanics
An empirical study of the precision of measurement by energy‐dispersive (EDS) and wavelength‐dispersive (WDS) techniques is described. Combined EDS–WDS quantitative analysis provides efficient instrument operation, optimum precision in major element analysis and the best limits of detection in trace element analysis. A software package for a combination EDS–WDS electron microprobe is described.