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Electron backscattering coefficient for the ‘film‐substrate’ solid system
Author(s) -
Kazakov S. V.,
Konnikov S. G.,
Tretyakov V. V.
Publication year - 1990
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300190604
Subject(s) - monte carlo method , substrate (aquarium) , materials science , layer (electronics) , incidence (geometry) , double layer (biology) , electron , optics , thin film , angle of incidence (optics) , physics , composite material , nanotechnology , mathematics , nuclear physics , statistics , oceanography , geology
The analytical expression for the total backscattering coefficient of a double‐layer solid system was obtained by the Niedrig combined model. Calculated results are given for the backscattering of a bulk target, free film and film on substrate at normal incidence, and also for a double‐layer structure at oblique incidence. These results are compared with experimental data and Monte Carlo calculations taken from the literature.