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Quantitative XRF analysis of surface layers: Influence of primary energy distribution and enhancement
Author(s) -
Rössiger V.
Publication year - 1988
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300170307
Subject(s) - attenuation , calibration , excitation , experimental data , distribution (mathematics) , energy (signal processing) , computational physics , surface (topology) , representation (politics) , x ray fluorescence , materials science , analytical chemistry (journal) , optics , fluorescence , chemistry , physics , statistics , mathematics , mathematical analysis , geometry , chromatography , quantum mechanics , politics , political science , law
A theoretical approach to quantitative x‐ray fluorescence analysis of multicomponent surface layers is described. It includes both the determination of the primary energy distribution of the tube and the calculation of the x‐ray intensities according to the fundamental parameter method. The effects of several inaccuracies, such as those from the primary distribution, from the treatment of secondary excitation and from the analytical representation of attenuation cross‐sections, are discussed in detail. Their influence on the XRF intensities was studied theoretically and compared with experimental data for a wide variety of well defined multilayer systems. The final accuracy of the theoretical calculations allows one to dispense with calibration reference standards in practical analytical work.