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Quantitative electron probe microanalysis using Gaussian ϕ(ρ z ) Curves
Author(s) -
Brown J. D.,
Packwood R. H.
Publication year - 1982
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300110411
Subject(s) - gaussian , histogram , extension (predicate logic) , microanalysis , expression (computer science) , electron probe microanalysis , basis (linear algebra) , electron , analytical chemistry (journal) , computational physics , optics , chemistry , physics , mathematics , computer science , quantum mechanics , geometry , scanning electron microscope , computational chemistry , artificial intelligence , chromatography , organic chemistry , image (mathematics) , programming language
Abstract The Gaussian expression for ϕ(ρ z ) has been used as the basis of a computer program for quantitative electron probe microanalysis. Corrections for absorption and atomic number are combined within the expression for ϕ(ρ z ) whereas the fluorescence correction is based on numerical integration over the primary and secondary intensities. Error histograms based on about 500 published analyses of standard specimens have been used to adjust the parameters in the Gaussian expression for optimum accuracy. The resultant error histograms are as narrow as those obtained for the most accurate of the current ZAF correction procedures. Extension of the method to non‐normal electron incidence is relatively straightforward.