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A peak integration method for acquiring x‐ray data for on‐line microprobe analysis
Author(s) -
Ferguson A. K.,
Sewell D. K. B.
Publication year - 1980
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300090204
Subject(s) - microprobe , electron microprobe , line (geometry) , focus (optics) , reliability (semiconductor) , spectrometer , x ray , analytical chemistry (journal) , optics , materials science , computer science , physics , chemistry , mathematics , mineralogy , nuclear physics , geometry , chromatography , power (physics) , quantum mechanics
The operation of a computer system for producing on‐line chemical analyses from a three‐spectrometer JEOL JXA‐5A electron microprobe is briefly discussed. A new method for acquiring the X‐ray data by integrating the area under the peak is discussed in greater detail. The increased reliability of the results from this new method are illustrated by considering the effect of focus error on the measured count rates.