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An X‐ray fluorescence method for coating thickness measurement
Author(s) -
Jain S. K.,
Gupta P. P.,
Eapen A. C.
Publication year - 1979
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300080106
Subject(s) - coating , materials science , fluorescence , absorption (acoustics) , attenuation coefficient , mass attenuation coefficient , x ray fluorescence , optics , analytical chemistry (journal) , composite material , chemistry , physics , chromatography
An X‐ray fluorescence method for the measurement of film and coating thickness has been described for use in situations where standard foils of the same material are not available for comparison. The method is based on the measurement of combined mass absorption coefficient of the coating element at the excitation and at the fluorescent energies using thin samples of a compound in which the coating element is present and then calculating the coating thickness using the fluorescence equation. The paper describes the theoretical approach and presents the result of the measurement of certain film and coating thicknesses which support the theoretical considerations.