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Quantitative energy‐dispersive X‐ray analysis using relative k ‐ratios
Author(s) -
Hurley R. G.,
Goss R. L.
Publication year - 1978
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300070206
Subject(s) - sensitivity (control systems) , electron microprobe , interpolation (computer graphics) , matrix (chemical analysis) , analytical chemistry (journal) , cathode ray , energy (signal processing) , beam (structure) , microprobe , spectrum analyzer , electron , x ray , chemistry , computational physics , optics , materials science , physics , mathematics , mineralogy , statistics , quantum mechanics , motion (physics) , classical mechanics , chromatography , electronic engineering , engineering
A new energy‐dispersive X‐ray technique has been developed for rapid quantitative analysis in the scanning electron microscope. The relative sensitivity is first established for as many elements as can be obtained in pure solid form. These values need only be measured once for a given accelerating potential and X‐ray take‐off angle. Relative sensitivities for elements not measured may be obtained by interpolation. Quantitative analysis may then be made by dividing the relative characteristic intensity for each element present by its respective elemental sensitivity. The ratios are subsequently adjusted by means of an iterative technique, using one of the commonly used electron microprobe matrix correction methods, until a set of concentrations which total 100% is obtained. The technique offers the advantages that neither the electron beam current nor the counting time enter into the calculations. Therefore, arbitrary counting times and unstable electron beam currents may be used. It is not necessary for standards to be continually analyzed; a single spectrum combined with the original sensitivity data contain all the information required for the analysis.