Premium
The atomic number and absorption corrections in electron microprobe analysis at low electron energies
Author(s) -
Parobek L.,
Brown J. D.
Publication year - 1978
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300070109
Subject(s) - atomic physics , electron , electron microprobe , absorption (acoustics) , physics , atomic number , chemistry , nuclear physics , optics , mineralogy
From an extensive series of measurements of ϕ(ρz) curves, at electron energies between 6 and 15 KeV, an empirical formula;ϕ(R)=DKn(KR) n−1 exp(−(KR) n ) where R=ρz+ρz o , was developed to accurately describe the shape and magnitude of the measured curves. On the basis of this equation a quantitative correction for absorprion and atomic mumber effects has been derived for low electron energies. A comparision of quantitative analysis using the above equation wit other absorption and atomic number corrections shows better agreement between calculated and known concenequation to a correction for fluorescence due to characteristic lines is outlined.