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Quantitative electron microprobe analysis using a lithium drifted silicon detector
Author(s) -
Reed S. J. B.,
Ware N. G.
Publication year - 1973
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1300020206
Subject(s) - electron microprobe , microprobe , lithium (medication) , detector , silicon , spectrometer , electron , spectral line , detection limit , analytical chemistry (journal) , materials science , physics , atomic physics , computational physics , nuclear physics , optics , chemistry , optoelectronics , medicine , chromatography , astronomy , metallurgy , endocrinology
Pulse pile‐up, dead time, escape peaks, background, and peak overlap in Si(Li) spectra are discussed in relation to microprobe analysis, and procedures for carrying out the necessary corrections for quantitative analysis of elements of atomic number 11 to 30 are described. The accuracy is generally comparable with that obtained with crystal spectrometers, though the limit of detection (about 0.1%) is higher.