Premium
High‐resolution microanalysis of suspended particulate matter using a transition edge sensor microcalorimeter x‐ray spectrometer
Author(s) -
Li Qinghui,
Suzuki Rina,
Ono Yuki,
Nakai Izumi,
Tanaka Keiichi,
Nakayama Satoshi,
Takahashi Haruo
Publication year - 2009
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1180
Subject(s) - microanalysis , spectrometer , analytical chemistry (journal) , resolution (logic) , detector , particulates , x ray , materials science , chemistry , optics , physics , chromatography , organic chemistry , artificial intelligence , computer science
Suspended particulate matter (SPM) collected in the urban area of Tokyo was analyzed using a transition edge sensor (TES) microcalorimeter x‐ray detector mounted on a FE‐SEM system. This prototype microcalorimeter spectrometer with an energy resolution of 19 eV identified some severe peak overlaps in the spectra measured by the traditional Si(Li) solid state detector, including S Kα with Pb Mα, Zn Lα with Na Kα, and Ti Kα with Ba Lα. In addition, the TES microcalorimeter showed good spatial resolution for the microanalysis of SPM. The focused ion beam(FIB) was successfully applied to fabricate a cross section of a single SPM particle. The chemical compositonal difference between surface and inner parts, and among different surface parts of the SPM was also determined. Through combination of the FIB technique and the TES microcalorimeter, we achieved a better understanding of the SPM. Copyright © 2009 John Wiley & Sons, Ltd.