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Development of a micro‐focus x‐ray fluorescence spectrometer using multiple target anode monochromatic x‐ray sources
Author(s) -
Maeo S.,
Krämer M.,
Utaka T.,
Taniguchi K.
Publication year - 2009
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1168
Subject(s) - spectrometer , monochromatic color , x ray fluorescence , x ray , x ray tube , optics , full width at half maximum , crystal (programming language) , excited state , excitation , analytical chemistry (journal) , materials science , physics , fluorescence , anode , atomic physics , chemistry , electrode , quantum mechanics , chromatography , computer science , programming language
A micro‐focus x‐ray fluorescence spectrometer using an x‐ray tube with multiple excitation sources and a doubly curved crystal (DCC) has been developed in this study. The excited target of the x‐ray tube can be selected from among Cr, W, and Rh. The focal spot size for the conditions of 30 kV and 0.5 mA was estimated to be about 10 µm in diameter. The doubly curved crystal has von Hámos geometry in the vertical direction and Johann geometry in the horizontal direction. Thin Si(111) was selected as the crystal material. It can focus the W‐ L β x‐rays into an area of 165.6 µm × 132.9 µm as the full width at half maximum for the sample position. The spectrometer combining the present x‐ray tube and DCCs was demonstrated to be able to measure an Ni particle 5 µm in diameter on an Si wafer by W‐ L β excitation. The lower limit of detection was estimated to be 7.29 pg, or equivalent to a particle 0.58 µm in diameter. Copyright © 2009 John Wiley & Sons, Ltd.