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GE‐MXRF analysis of multilayer films
Author(s) -
Yang Jun,
Tsuji Kouichi,
Han Dongyan,
Ding Xunliang
Publication year - 2008
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/xrs.1108
Subject(s) - microbeam , x ray fluorescence , materials science , optics , lens (geology) , fluorescence , vacuum arc , analytical chemistry (journal) , physics , chemistry , plasma , quantum mechanics , chromatography
Polycapillary x‐ray optics (capillary x‐ray lens) is now popular in x‐ray fluorescence (XRF) analysis. Such an x‐ray lens can collect x‐rays emitted from an x‐ray source in a large solid angle and form a very intense x‐ray microbeam which is very convenient for micro x‐ray fluorescence (MXRF) analysis. In this paper, a new method called grazing exit micro x‐ray fluorescence analysis (GE‐MXRF), which combines an x‐ray lens used to form an intense XRF source was developed and applied in multilayer film analysis. Such a method can give the information of film composition, density, and thickness. Through two‐dimensional scan of the film sample, the information of film uniformity can be acquired; meanwhile, this method is also useful in adjusting experiment condition during the film preparation with metal vapor vacuum arc (MEVVA) source ion implantation. Copyright © 2008 John Wiley & Sons, Ltd.