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Arc‐PVD‐Beschichtung profitiert von Schrauben‐Vakuumpumpen
Publication year - 2020
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.202070306
Subject(s) - materials science , arc (geometry) , physics , engineering , mechanical engineering
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