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Der Alleskönner der Messtechnik
Author(s) -
Granovskij Mihail,
Kohl Marcel,
Zimare Anton,
Bergner Klaus,
Flämmich Michael,
Bergner Ute
Publication year - 2019
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201900727
Subject(s) - residual gas analyzer , ion source , ultra high vacuum , materials science , pressure measurement , ion , mass spectrometry , optoelectronics , analytical chemistry (journal) , nanotechnology , physics , engineering , mechanical engineering , chemistry , chromatography , quantum mechanics
Summary The all‐rounder of measurement technology – Monitoring of vacuum properties The Novion is an all‐rounder of vacuum measurement technology. The newly developed sensor is based on a novel ion source and an integrated TOF mass spectrometer. The new vacuum measuring instrument is versatile: precise total pressure measurement over a wide range and simultaneously determination of helium partial pressure and residual gas analysis. By using the patented ion source, the instrument also achieves a high dynamic range without the use of a cost‐intensive electron multiplier, down to the UHV range. The Novion comes with a compact design, easy maintenance and an intuitive operation. The article covers the fields of application of this multi‐method sensor and explains its functionality in detail.