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Messung schneller Druckänderungen im Grobvakuumbereich
Author(s) -
Stiebritz Ingo
Publication year - 2019
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201900722
Subject(s) - pressure measurement , piezoresistive effect , millisecond , capacitive sensing , analytical chemistry (journal) , electrical engineering , materials science , chemistry , thermodynamics , physics , composite material , engineering , chromatography , astronomy
Summary Measurement of fast pressure changes in the rough vacuum range Using commercially available vacuum gauges, pressure jumps executed in the millisecond range between 1000 and just below 1 mbar were measured in a specially developed system. Of the investigated vacuum gauges, the piezoresistive devices had the shortest response times. They reacted within 1 – 5 ms and achieved a valid measured value after approximately 20 ms. The capacitive manometers responded after 5 – 20 ms and reached a valid measured value after 50 – 100 ms. Lower‐priced Pirani gauges reacted with a response time of 50 – 100 ms and a valid measured value after 200 – 500 ms, which is based on the measuring principle. Besides, a pressure measurement opposed to the actual pressure tendency can be problematic with Piranis.