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Measuring Thin Transparent Films Precisely
Author(s) -
Quinten Michael
Publication year - 2019
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201900706
Subject(s) - fast fourier transform , nonlinear system , context (archaeology) , fourier transform , materials science , resolution (logic) , nonlinear regression , thin layer , layer (electronics) , regression , thin film , regression analysis , optics , algorithm , computer science , mathematics , physics , nanotechnology , statistics , mathematical analysis , artificial intelligence , geology , paleontology , quantum mechanics
Summary Fast Fourier transform (FTT) and nonlinear regression analysis are established analysis methods in the context of reflectometric layer thickness determination on thin transparent films. Where applicable, FFT is a very fast method for determining film thickness, but with limitations in resolution. The far more complex nonlinear regression analysis provides more accurate results. But it also has its problems which are discussed here.