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Improving the structural quality and adhesion of functional coatings
Author(s) -
Kostrin D. K.
Publication year - 2018
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201800701
Subject(s) - materials science , coating , graphite , cathode , annealing (glass) , plasma , electric arc , substrate (aquarium) , composite material , optoelectronics , nanotechnology , chemistry , electrode , oceanography , geology , physics , quantum mechanics
Summary In this paper a method of improving the structural quality and adhesion of functional coatings due to the pulsed mode of operation of a vacuum arc plasma source is described. The experiments were carried out by producing a carbon‐based coating on a molybdenum substrate by spraying a graphite cathode in the benzene vapors. Plasma flow control is provided by alternating connection of two power sources, which allows variable closure of electron and ion currents on the substrate. This mode of operation allows to alternate the mode of heating and active diffusion of particles into the substrate with the mode of their deposition, as well as to provide the process of formation and annealing of the coating layers.