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Bestimmung des Saugvermögens von Ionengetterpumpen
Author(s) -
Meierott Stefan,
Walter Marco,
Bergner Klaus,
Flämmich Michael,
Bergner Ute
Publication year - 2018
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201800696
Subject(s) - reproducibility , getter , analytical chemistry (journal) , sampling (signal processing) , chemistry , materials science , engineering , electrical engineering , chromatography , detector
Summary The pumping speed of ion getter pumps – Comparison of measurement methods Pumping speed measurements of sputtering ion pumps are typically carried out according to DIN 28429 or ISO/DIS 3556‐1.2. In this article, we take a look at the differences between these two measurement methods. Based on experimental data, the impact of pressure holding times on reproducibility and absolute values of the extracted pumping speeds are discussed. Pumping speed measurements according to the now withdrawn ISO/DIN 3556‐1.2 may yield up to 30 % higher values than values based on the validated DIN28429. The definition of sampling times according to DIN 28429 enables reproducible measurements.