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Zuverlässige Prozesse durch Vakuumkomponenten mit definierten Ausgasraten
Author(s) -
Worsch Christian,
Flämmich Michael,
Bergner Ute
Publication year - 2018
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201800691
Subject(s) - outgassing , cleanroom , process engineering , vacuum level , vacuum tube , process (computing) , mechanical engineering , materials science , nanotechnology , engineering , physics , chemistry , computer science , electrical engineering , organic chemistry , quantum mechanics , operating system
Summary Reliable processes by use of vacuum components with specified outgassing rates Contamination of vacuum components cannot be avoided in the manufacturing process. In order to significantly reduce particulate and organic impurities, a multi‐stage cleaning process and proof of cleanliness are essential. In order to guarantee a reproducible quality of the cleanliness of vacuum components, uniform standards for defined outgassing rates are necessary. The development of Vacom Purity Classes serves the generally accessible specification of components and characterises their vacuum and cleanroom suitability. Vacom Vacuum Classes guarantee the suitability of vacuum components for use in UHV/XHV. In this article, the importance of cleaning of vacuum chambers and components is examined as well as the need to establish a uniform method for the quantitative measurement of the outgassing rate is highlighted. The systematic division into Vacom Purity and Vacuum Classes provides the basis for a cross‐industry standard for the defined quality of vacuum processes.