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Bestimmung von Ausgas‐ und Desorptionsraten mittels Restgasanalysator
Author(s) -
Barfuss Heinz,
Pfeifer Frank
Publication year - 2018
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201800683
Subject(s) - outgassing , desorption , residual gas analyzer , materials science , chemistry , adsorption , chromatography , mass spectrometry , organic chemistry
Summary Determination of Outgassing and Desorption Rates by Means of Residual Gas Analysis Especially when using plastic materials in vacuum chambers it is essential to know the amount of gases outgassing from the surface of those materials. Depending on the so‐called outgassing or desorption rate one can decide if the proposed plastic material is suited for the desired application and how the vacuum system has to be configured, so that the use of the particular material makes sense. The article will demonstrate by means of 2 examples that there exist temperature‐dependent outgassing behaviors of different materials. It also gives an overview of the measuring equipment set up to determine the outgassing rates.