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Effizientes Wafer‐Handling durch modernste Vakuumtechnologie
Author(s) -
Merkle Uli
Publication year - 2017
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201700665
Subject(s) - citation , wafer , library science , engineering , computer science , electrical engineering