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Novel Deposition System Designs for Thin Film Materials Research
Author(s) -
Gaines James Roland
Publication year - 2017
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201700641
Subject(s) - flexibility (engineering) , nanotechnology , deposition (geology) , thin film , materials science , vacuum deposition , nanolithography , footprint , computer science , engineering physics , engineering , fabrication , medicine , paleontology , statistics , alternative medicine , mathematics , pathology , sediment , biology
Modern thin film deposition systems must be designed for maximum flexibility with respect to their physical footprint as well as the range of processes and materials they can support. Increasingly disciplines that have not traditionally utilized thin film deposition, such as biology and medicine, are demanding that materials never intended for vacuum be applied on a molecular level. Multi‐user nanofabrication facilities are tasked to adapt and accommodate new requirements while also making room for new tools in environments which may already be over crowded. New system designs, mindful of these challenges, are discussed.