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Large Area Co‐Sputtering
Author(s) -
Christie David J.
Publication year - 2016
Publication title -
vakuum in forschung und praxis
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201690040
Subject(s) - energy (signal processing) , citation , art history , sputtering , library science , engineering , art , engineering physics , computer science , nanotechnology , physics , materials science , thin film , quantum mechanics