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15th International Conference on Plasma Surface Engineering
Publication year - 2016
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201690018
Subject(s) - citation , library science , engineering physics , engineering , nanotechnology , computer science , materials science