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From color to chemometrics
Author(s) -
Hellwig Chris,
Büttner Torsten,
Krause Mario
Publication year - 2016
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201600617
Subject(s) - chemometrics , process engineering , quality (philosophy) , process (computing) , product (mathematics) , biochemical engineering , product line , coating , set (abstract data type) , computer science , engineering , biological system , engineering drawing , manufacturing engineering , materials science , mathematics , nanotechnology , machine learning , physics , geometry , quantum mechanics , biology , programming language , operating system
In‐line and in‐situ process control for thin‐film properties during the production is an important factor to improve and stabilize the product quality. Furthermore machine set‐up times can be reduced significantly. ZEISS provides a variety of methods to fulfill this need. The article shows how a combination of different process capable methods — color, physical, and chemometric models — helps the operator to stabilize coating processes and control the final product quality with a single equipment.