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Enhanced processing of coatings on glass surfaces
Author(s) -
Gerhard Christoph,
Gredner Alexander,
Mainusch Nils,
Viöl Wolfgang
Publication year - 2016
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201600614
Subject(s) - plasma , laser , materials science , irradiation , silicon , annealing (glass) , amorphous solid , usable , atmospheric pressure plasma , composite material , optoelectronics , optics , chemistry , computer science , physics , nuclear physics , organic chemistry , quantum mechanics , world wide web
In this contribution, basic technically usable interactions of atmospheric pressure plasmas (APP), laser irradiation and solids as well as a technique which combines such plasmas and laser irradiation are introduced. Two examples for plasma‐enhanced laser processing of coatings on glass surfaces are presented in more detail. First, APP‐assisted annealing of amorphous silicon layers is discussed. It is shown that the crystallised area is notably increased by assisting plasmas where the particular improvement factor depends on the particularly applied type of plasma. Second, the impact of assisting plasmas on laser removal of lacquers and varnishes from glass surfaces is presented. By introducing a plasma jet to the laser removal process, the laser energy required for cleaning or delamination is notably reduced.