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Flash Lamp Annealing of ITO thin films on ultra‐thin glass
Author(s) -
Weller Stephanie,
Junghähnel Manuela
Publication year - 2015
Publication title -
vakuum in forschung und praxis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.213
H-Index - 13
eISSN - 1522-2454
pISSN - 0947-076X
DOI - 10.1002/vipr.201500586
Subject(s) - annealing (glass) , flash lamp , materials science , thin film , transmittance , optoelectronics , indium tin oxide , composite material , optics , nanotechnology , physics
Abstract Ultra‐fast thermal annealing of thin films with annealing times of few milliseconds are faster und more energy efficient than conventional furnace annealing methods. By using flash lamp annealing, only the surface is heated while the substrate remains cold. This allows the refinement of indium‐tin‐oxide films on rigid and ultra‐thin flexible glass and improves their conductivity and transmittance.